PRODUCTS

FREEZER

OEM optical engines for material scribing

 

Freezer engine

Features: 

  • Robust and reliable industrial grade design
  • Built-in sample visualisation, autofocus and vertical objective lens positioning systems
  • High versatility - automatic optical power, polarisation and laser focal point configuration adjustment
  • Built-in automatic sample surface recognition
  • Integrated with ultrafast fs/ps lasers

 

FREEZER series optical engines feature robust and reliable design that is well optimized for industry. We provide devices that are core parts of industrial scribing stations. FREEZER optical engines are dedicated for crystalline substrate scribing - sapphire, silicon carbide, gallium nitride, lithium niobate, lithium tantalate, quartz and glass. Our main target materials: sapphire, silicon carbide and gallium nitride are widely applied in LED, high power and radio frequency electronics manufacturing industry. We are aiming at integrators and potential customers to work on a mutual project to build industrial scribing stations featuring FREEZER series optical engines. Contact us for more information.

 

 Specifications  Freezer01  Freezer02  Freezer03
   Sample specifications
 Applied for processing of: Al2O3, LiNbO3, LiTaO3, quartz, glass SiC, GaN
 Wafer size Compatible with stations designed for any wafer size
 Optimal wafer thickness, μm 50-300  
 Applicable for back-coated wafers Yes No Yes
  Scribing specifications   
 Scribing velocity, mm/s On customer request
 Max. throughput, 4" wafer/h 91 312
  Vertical positioning specifications
Range, mm 0.4 8
Resolution, μm <0.005 1.25
Surface recognition precision, μm 2
Autofocus precision, μm ±2 -
  Optical specifications
Number of foci 1 or 2 1, 2, 4 or 8
Integrated with DPSS ultrafast laser
Adjustable laser parameters Output power, polarisation, focus configuration
Microscope magnification x44 x9.3

 1 - for chip size: 0.5 x 0.5 mm, 2 - for chip size: 3 x 3 mm

 

General specifications Freezer01  Freezer02  Freezer03 
Dimensions, mm 700x450x450 900x450x450
Weight, kg 40 60
Operating temperature 15-30 ºC   
Relative humidity < 80% (non condensing)
Power supply 100-230 VAC, 50/60 Hz, <1kW
  Requirements for sample positioning system
Process control Position synchronized output (PSO)   

 

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